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There are two methods that have been used to physically make the masks. The mask manufacturing facility operated by the observatory; and an industrial photoetching technique (masks have been this way for LDSS-1).
You are strongly advised to use the observatory facility rather than alternative methods since:
You should only need to consider alternative methods if the observatory facility is not available or if you require a very unusual slit configuration that cannot be provided by the observatory (eg very narrow slits). In this case you will be entirely responsible for getting the masks made at your own expense.